9/10/2010	12:00:59 AM	Helium valve closed
9/10/2010	12:00:59 AM	BCl3 valve closed
9/10/2010	12:00:59 AM	Main Vac valve closed
9/10/2010	12:00:59 AM	Bypass valve closed
9/10/2010	12:00:59 AM	H2 valve opened
9/10/2010	12:00:59 AM	PH3 valve opened
9/10/2010	12:00:59 AM	SiCl4 pre valve opened
9/10/2010	12:00:59 AM	SiCl4 post valve opened
9/10/2010	12:00:59 AM	Bubbler valve opened
9/10/2010	12:00:59 AM	Helium MFC set to  0.000000
9/10/2010	12:00:59 AM	H2 MFC set to  500.000000
9/10/2010	12:00:59 AM	BCl3 MFC set to  0.000000
9/10/2010	12:00:59 AM	PHl3 MFC set to  1.000000
9/10/2010	12:00:59 AM	SiCl4 MFC set to  50.000000
9/10/2010	12:00:59 AM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:00:59 AM	Tube furnace set to 1000
9/10/2010	12:25:59 AM	H2 valve closed
9/10/2010	12:25:59 AM	BCl3 valve closed
9/10/2010	12:25:59 AM	PH3 valve closed
9/10/2010	12:25:59 AM	SiCl4 pre valve closed
9/10/2010	12:25:59 AM	SiCl4 post valve closed
9/10/2010	12:25:59 AM	Main Vac valve closed
9/10/2010	12:25:59 AM	Bypass valve closed
9/10/2010	12:25:59 AM	Helium valve opened
9/10/2010	12:25:59 AM	Bubbler valve opened
9/10/2010	12:25:59 AM	Helium MFC set to  500.000000
9/10/2010	12:25:59 AM	H2 MFC set to  0.000000
9/10/2010	12:25:59 AM	BCl3 MFC set to  0.000000
9/10/2010	12:25:59 AM	PHl3 MFC set to  0.000000
9/10/2010	12:25:59 AM	SiCl4 MFC set to  0.000000
9/10/2010	12:25:59 AM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:25:59 AM	Tube furnace set to 0
9/10/2010	12:45:59 AM	Helium valve closed
9/10/2010	12:45:59 AM	H2 valve closed
9/10/2010	12:45:59 AM	BCl3 valve closed
9/10/2010	12:45:59 AM	PH3 valve closed
9/10/2010	12:45:59 AM	SiCl4 pre valve closed
9/10/2010	12:45:59 AM	SiCl4 post valve closed
9/10/2010	12:45:59 AM	Main Vac valve closed
9/10/2010	12:45:59 AM	Bypass valve closed
9/10/2010	12:45:59 AM	Bubbler valve closed
9/10/2010	12:45:59 AM	Helium MFC set to  0.000000
9/10/2010	12:45:59 AM	H2 MFC set to  0.000000
9/10/2010	12:45:59 AM	BCl3 MFC set to  0.000000
9/10/2010	12:45:59 AM	PHl3 MFC set to  0.000000
9/10/2010	12:45:59 AM	SiCl4 MFC set to  0.000000
9/10/2010	12:45:59 AM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:45:59 AM	Tube furnace set to 0
9/10/2010	12:45:59 AM	Run finished at 12:45 AM
9/10/2010	12:49:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/10/2010	12:49:46 AM	Recipe started at 12:49 AM
9/10/2010	12:49:46 AM	Helium valve closed
9/10/2010	12:49:46 AM	H2 valve closed
9/10/2010	12:49:46 AM	BCl3 valve closed
9/10/2010	12:49:46 AM	PH3 valve closed
9/10/2010	12:49:46 AM	SiCl4 pre valve closed
9/10/2010	12:49:46 AM	SiCl4 post valve closed
9/10/2010	12:49:46 AM	Main Vac valve closed
9/10/2010	12:49:46 AM	Bubbler valve closed
9/10/2010	12:49:46 AM	Bypass valve opened
9/10/2010	12:49:46 AM	Helium MFC set to  0.000000
9/10/2010	12:49:46 AM	H2 MFC set to  0.000000
9/10/2010	12:49:46 AM	BCl3 MFC set to  0.000000
9/10/2010	12:49:46 AM	PHl3 MFC set to  0.000000
9/10/2010	12:49:46 AM	SiCl4 MFC set to  0.000000
9/10/2010	12:49:46 AM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:49:46 AM	Tube furnace set to 0
9/10/2010	12:50:27 AM	Helium valve closed
9/10/2010	12:50:27 AM	H2 valve closed
9/10/2010	12:50:27 AM	BCl3 valve closed
9/10/2010	12:50:27 AM	PH3 valve closed
9/10/2010	12:50:27 AM	SiCl4 pre valve closed
9/10/2010	12:50:27 AM	SiCl4 post valve closed
9/10/2010	12:50:27 AM	Bubbler valve closed
9/10/2010	12:50:27 AM	Main Vac valve opened
9/10/2010	12:50:27 AM	Bypass valve opened
9/10/2010	12:50:27 AM	Helium MFC set to  0.000000
9/10/2010	12:50:27 AM	H2 MFC set to  0.000000
9/10/2010	12:50:27 AM	BCl3 MFC set to  0.000000
9/10/2010	12:50:27 AM	PHl3 MFC set to  0.000000
9/10/2010	12:50:27 AM	SiCl4 MFC set to  0.000000
9/10/2010	12:50:27 AM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:50:27 AM	Tube furnace set to 0
9/10/2010	12:50:27 AM	Run finished at 12:50 AM
9/10/2010	12:50:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/10/2010	12:50:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/10/2010	12:50:45 AM	Recipe started at 12:50 AM
9/10/2010	12:50:46 AM	Helium valve closed
9/10/2010	12:50:46 AM	H2 valve closed
9/10/2010	12:50:46 AM	BCl3 valve closed
9/10/2010	12:50:46 AM	PH3 valve closed
9/10/2010	12:50:46 AM	SiCl4 pre valve closed
9/10/2010	12:50:46 AM	SiCl4 post valve closed
9/10/2010	12:50:46 AM	Main Vac valve closed
9/10/2010	12:50:46 AM	Bubbler valve closed
9/10/2010	12:50:46 AM	Bypass valve opened
9/10/2010	12:50:46 AM	Helium MFC set to  0.000000
9/10/2010	12:50:46 AM	H2 MFC set to  0.000000
9/10/2010	12:50:46 AM	BCl3 MFC set to  0.000000
9/10/2010	12:50:46 AM	PHl3 MFC set to  0.000000
9/10/2010	12:50:46 AM	SiCl4 MFC set to  0.000000
9/10/2010	12:50:46 AM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:50:46 AM	Tube furnace set to 0
9/10/2010	12:50:46 AM	Helium valve closed
9/10/2010	12:50:46 AM	H2 valve closed
9/10/2010	12:50:46 AM	BCl3 valve closed
9/10/2010	12:50:46 AM	PH3 valve closed
9/10/2010	12:50:46 AM	SiCl4 pre valve closed
9/10/2010	12:50:46 AM	SiCl4 post valve closed
9/10/2010	12:50:46 AM	Bubbler valve closed
9/10/2010	12:50:46 AM	Main Vac valve opened
9/10/2010	12:50:46 AM	Bypass valve opened
9/10/2010	12:50:46 AM	Helium MFC set to  0.000000
9/10/2010	12:50:46 AM	H2 MFC set to  0.000000
9/10/2010	12:50:46 AM	BCl3 MFC set to  0.000000
9/10/2010	12:50:46 AM	PHl3 MFC set to  0.000000
9/10/2010	12:50:46 AM	SiCl4 MFC set to  0.000000
9/10/2010	12:50:46 AM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:50:46 AM	Tube furnace set to 0
9/10/2010	12:51:46 AM	H2 valve closed
9/10/2010	12:51:46 AM	BCl3 valve closed
9/10/2010	12:51:46 AM	PH3 valve closed
9/10/2010	12:51:46 AM	SiCl4 pre valve closed
9/10/2010	12:51:46 AM	SiCl4 post valve closed
9/10/2010	12:51:46 AM	Bubbler valve closed
9/10/2010	12:51:46 AM	Helium valve opened
9/10/2010	12:51:46 AM	Main Vac valve opened
9/10/2010	12:51:46 AM	Bypass valve opened
9/10/2010	12:51:46 AM	Helium MFC set to  100.000000
9/10/2010	12:51:46 AM	H2 MFC set to  0.000000
9/10/2010	12:51:46 AM	BCl3 MFC set to  0.000000
9/10/2010	12:51:46 AM	PHl3 MFC set to  0.000000
9/10/2010	12:51:46 AM	SiCl4 MFC set to  0.000000
9/10/2010	12:51:46 AM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:51:46 AM	Tube furnace set to 0
9/10/2010	12:52:46 AM	Helium valve closed
9/10/2010	12:52:46 AM	H2 valve closed
9/10/2010	12:52:46 AM	BCl3 valve closed
9/10/2010	12:52:46 AM	PH3 valve closed
9/10/2010	12:52:46 AM	SiCl4 pre valve closed
9/10/2010	12:52:46 AM	SiCl4 post valve closed
9/10/2010	12:52:46 AM	Bubbler valve closed
9/10/2010	12:52:46 AM	Main Vac valve opened
9/10/2010	12:52:46 AM	Bypass valve opened
9/10/2010	12:52:46 AM	Helium MFC set to  0.000000
9/10/2010	12:52:46 AM	H2 MFC set to  0.000000
9/10/2010	12:52:46 AM	BCl3 MFC set to  0.000000
9/10/2010	12:52:46 AM	PHl3 MFC set to  0.000000
9/10/2010	12:52:46 AM	SiCl4 MFC set to  0.000000
9/10/2010	12:52:46 AM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:52:47 AM	Tube furnace set to 0
9/10/2010	12:53:47 AM	H2 valve closed
9/10/2010	12:53:47 AM	BCl3 valve closed
9/10/2010	12:53:47 AM	PH3 valve closed
9/10/2010	12:53:47 AM	SiCl4 pre valve closed
9/10/2010	12:53:47 AM	SiCl4 post valve closed
9/10/2010	12:53:47 AM	Bubbler valve closed
9/10/2010	12:53:47 AM	Helium valve opened
9/10/2010	12:53:47 AM	Main Vac valve opened
9/10/2010	12:53:47 AM	Bypass valve opened
9/10/2010	12:53:47 AM	Helium MFC set to  100.000000
9/10/2010	12:53:47 AM	H2 MFC set to  0.000000
9/10/2010	12:53:47 AM	BCl3 MFC set to  0.000000
9/10/2010	12:53:47 AM	PHl3 MFC set to  0.000000
9/10/2010	12:53:47 AM	SiCl4 MFC set to  0.000000
9/10/2010	12:53:47 AM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:53:47 AM	Tube furnace set to 0
9/10/2010	12:54:47 AM	Helium valve closed
9/10/2010	12:54:47 AM	H2 valve closed
9/10/2010	12:54:47 AM	BCl3 valve closed
9/10/2010	12:54:47 AM	PH3 valve closed
9/10/2010	12:54:47 AM	SiCl4 pre valve closed
9/10/2010	12:54:47 AM	SiCl4 post valve closed
9/10/2010	12:54:47 AM	Bubbler valve closed
9/10/2010	12:54:47 AM	Main Vac valve opened
9/10/2010	12:54:47 AM	Bypass valve opened
9/10/2010	12:54:47 AM	Helium MFC set to  0.000000
9/10/2010	12:54:47 AM	H2 MFC set to  0.000000
9/10/2010	12:54:47 AM	BCl3 MFC set to  0.000000
9/10/2010	12:54:47 AM	PHl3 MFC set to  0.000000
9/10/2010	12:54:47 AM	SiCl4 MFC set to  0.000000
9/10/2010	12:54:47 AM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:54:47 AM	Tube furnace set to 0
9/10/2010	12:55:47 AM	H2 valve closed
9/10/2010	12:55:47 AM	BCl3 valve closed
9/10/2010	12:55:47 AM	PH3 valve closed
9/10/2010	12:55:47 AM	SiCl4 pre valve closed
9/10/2010	12:55:47 AM	SiCl4 post valve closed
9/10/2010	12:55:47 AM	Bubbler valve closed
9/10/2010	12:55:47 AM	Helium valve opened
9/10/2010	12:55:47 AM	Main Vac valve opened
9/10/2010	12:55:47 AM	Bypass valve opened
9/10/2010	12:55:47 AM	Helium MFC set to  100.000000
9/10/2010	12:55:47 AM	H2 MFC set to  0.000000
9/10/2010	12:55:47 AM	BCl3 MFC set to  0.000000
9/10/2010	12:55:47 AM	PHl3 MFC set to  0.000000
9/10/2010	12:55:47 AM	SiCl4 MFC set to  0.000000
9/10/2010	12:55:47 AM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:55:47 AM	Tube furnace set to 0
9/10/2010	12:56:47 AM	Helium valve closed
9/10/2010	12:56:47 AM	H2 valve closed
9/10/2010	12:56:47 AM	BCl3 valve closed
9/10/2010	12:56:47 AM	PH3 valve closed
9/10/2010	12:56:47 AM	SiCl4 pre valve closed
9/10/2010	12:56:47 AM	SiCl4 post valve closed
9/10/2010	12:56:47 AM	Bubbler valve closed
9/10/2010	12:56:47 AM	Main Vac valve opened
9/10/2010	12:56:47 AM	Bypass valve opened
9/10/2010	12:56:47 AM	Helium MFC set to  0.000000
9/10/2010	12:56:47 AM	H2 MFC set to  0.000000
9/10/2010	12:56:47 AM	BCl3 MFC set to  0.000000
9/10/2010	12:56:47 AM	PHl3 MFC set to  0.000000
9/10/2010	12:56:47 AM	SiCl4 MFC set to  0.000000
9/10/2010	12:56:47 AM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:56:47 AM	Tube furnace set to 0
9/10/2010	12:57:47 AM	H2 valve closed
9/10/2010	12:57:47 AM	BCl3 valve closed
9/10/2010	12:57:47 AM	PH3 valve closed
9/10/2010	12:57:47 AM	SiCl4 pre valve closed
9/10/2010	12:57:47 AM	SiCl4 post valve closed
9/10/2010	12:57:47 AM	Bubbler valve closed
9/10/2010	12:57:47 AM	Helium valve opened
9/10/2010	12:57:47 AM	Main Vac valve opened
9/10/2010	12:57:47 AM	Bypass valve opened
9/10/2010	12:57:47 AM	Helium MFC set to  100.000000
9/10/2010	12:57:47 AM	H2 MFC set to  0.000000
9/10/2010	12:57:47 AM	BCl3 MFC set to  0.000000
9/10/2010	12:57:47 AM	PHl3 MFC set to  0.000000
9/10/2010	12:57:47 AM	SiCl4 MFC set to  0.000000
9/10/2010	12:57:47 AM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:57:48 AM	Tube furnace set to 0
9/10/2010	12:58:48 AM	Helium valve closed
9/10/2010	12:58:48 AM	H2 valve closed
9/10/2010	12:58:48 AM	BCl3 valve closed
9/10/2010	12:58:48 AM	PH3 valve closed
9/10/2010	12:58:48 AM	SiCl4 pre valve closed
9/10/2010	12:58:48 AM	SiCl4 post valve closed
9/10/2010	12:58:48 AM	Bubbler valve closed
9/10/2010	12:58:48 AM	Main Vac valve opened
9/10/2010	12:58:48 AM	Bypass valve opened
9/10/2010	12:58:48 AM	Helium MFC set to  0.000000
9/10/2010	12:58:48 AM	H2 MFC set to  0.000000
9/10/2010	12:58:48 AM	BCl3 MFC set to  0.000000
9/10/2010	12:58:48 AM	PHl3 MFC set to  0.000000
9/10/2010	12:58:48 AM	SiCl4 MFC set to  0.000000
9/10/2010	12:58:48 AM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:58:48 AM	Tube furnace set to 0
9/10/2010	12:59:48 AM	H2 valve closed
9/10/2010	12:59:48 AM	BCl3 valve closed
9/10/2010	12:59:48 AM	PH3 valve closed
9/10/2010	12:59:48 AM	SiCl4 pre valve closed
9/10/2010	12:59:48 AM	SiCl4 post valve closed
9/10/2010	12:59:48 AM	Bubbler valve closed
9/10/2010	12:59:48 AM	Helium valve opened
9/10/2010	12:59:48 AM	Main Vac valve opened
9/10/2010	12:59:48 AM	Bypass valve opened
9/10/2010	12:59:48 AM	Helium MFC set to  100.000000
9/10/2010	12:59:48 AM	H2 MFC set to  0.000000
9/10/2010	12:59:48 AM	BCl3 MFC set to  0.000000
9/10/2010	12:59:48 AM	PHl3 MFC set to  0.000000
9/10/2010	12:59:48 AM	SiCl4 MFC set to  0.000000
9/10/2010	12:59:48 AM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:59:48 AM	Tube furnace set to 0
9/10/2010	1:00:48 AM	Helium valve closed
9/10/2010	1:00:48 AM	H2 valve closed
9/10/2010	1:00:48 AM	BCl3 valve closed
9/10/2010	1:00:48 AM	PH3 valve closed
9/10/2010	1:00:48 AM	SiCl4 pre valve closed
9/10/2010	1:00:48 AM	SiCl4 post valve closed
9/10/2010	1:00:48 AM	Bubbler valve closed
9/10/2010	1:00:48 AM	Main Vac valve opened
9/10/2010	1:00:48 AM	Bypass valve opened
9/10/2010	1:00:48 AM	Helium MFC set to  0.000000
9/10/2010	1:00:48 AM	H2 MFC set to  0.000000
9/10/2010	1:00:48 AM	BCl3 MFC set to  0.000000
9/10/2010	1:00:48 AM	PHl3 MFC set to  0.000000
9/10/2010	1:00:48 AM	SiCl4 MFC set to  0.000000
9/10/2010	1:00:48 AM	Bypass solenoid MFC set to  0.000000
9/10/2010	1:00:48 AM	Tube furnace set to 0
9/10/2010	1:01:48 AM	H2 valve closed
9/10/2010	1:01:48 AM	BCl3 valve closed
9/10/2010	1:01:48 AM	PH3 valve closed
9/10/2010	1:01:48 AM	SiCl4 pre valve closed
9/10/2010	1:01:48 AM	SiCl4 post valve closed
9/10/2010	1:01:48 AM	Bubbler valve closed
9/10/2010	1:01:48 AM	Helium valve opened
9/10/2010	1:01:48 AM	Main Vac valve opened
9/10/2010	1:01:48 AM	Bypass valve opened
9/10/2010	1:01:48 AM	Helium MFC set to  100.000000
9/10/2010	1:01:48 AM	H2 MFC set to  0.000000
9/10/2010	1:01:48 AM	BCl3 MFC set to  0.000000
9/10/2010	1:01:48 AM	PHl3 MFC set to  0.000000
9/10/2010	1:01:48 AM	SiCl4 MFC set to  0.000000
9/10/2010	1:01:48 AM	Bypass solenoid MFC set to  0.000000
9/10/2010	1:01:48 AM	Tube furnace set to 0
9/10/2010	1:02:02 AM	Run aborted at 1:02 AM
9/10/2010	1:02:02 AM	Helium valve closed
9/10/2010	1:02:02 AM	H2 valve closed
9/10/2010	1:02:02 AM	BCl3 valve closed
9/10/2010	1:02:02 AM	PH3 valve closed
9/10/2010	1:02:02 AM	SiCl4 pre valve closed
9/10/2010	1:02:02 AM	SiCl4 post valve closed
9/10/2010	1:02:02 AM	Bypass valve closed
9/10/2010	1:02:02 AM	Main Vac valve closed
9/10/2010	1:02:02 AM	Bubbler valve closed
9/10/2010	1:02:02 AM	Helium MFC set to  0.000000
9/10/2010	1:02:02 AM	H2 MFC set to  0.000000
9/10/2010	1:02:02 AM	BCl3 MFC set to  0.000000
9/10/2010	1:02:02 AM	PHl3 MFC set to  0.000000
9/10/2010	1:02:02 AM	SiCl4 MFC set to  0.000000
9/10/2010	1:02:02 AM	Tube furnace set to 0
9/10/2010	1:02:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/10/2010	1:02:08 AM	Main Vac valve opened
9/10/2010	1:02:08 AM	Bypass valve opened
9/10/2010	1:03:41 AM	Bypass valve closed
9/10/2010	1:03:42 AM	Main Vac valve closed
9/10/2010	1:03:47 AM	Bypass valve opened
9/10/2010	1:03:48 AM	Main Vac valve opened
9/10/2010	1:03:49 AM	Main Vac valve closed
9/10/2010	1:03:50 AM	Main Vac valve opened
9/10/2010	10:32:42 AM	Helium MFC set to  100.000000
9/10/2010	10:32:44 AM	Helium valve opened
9/10/2010	10:58:07 AM	Helium valve closed
9/10/2010	10:58:11 AM	Helium MFC set to  0.000000
9/10/2010	11:00:27 AM	Bypass valve closed
9/10/2010	11:00:28 AM	Main Vac valve closed
9/10/2010	11:01:35 AM	Recipe started at 11:01 AM
9/10/2010	11:01:35 AM	Helium valve closed
9/10/2010	11:01:35 AM	BCl3 valve closed
9/10/2010	11:01:35 AM	PH3 valve closed
9/10/2010	11:01:35 AM	SiCl4 pre valve closed
9/10/2010	11:01:35 AM	SiCl4 post valve closed
9/10/2010	11:01:35 AM	Main Vac valve closed
9/10/2010	11:01:35 AM	Bypass valve closed
9/10/2010	11:01:35 AM	Bubbler valve closed
9/10/2010	11:01:35 AM	H2 valve opened
9/10/2010	11:01:35 AM	Helium MFC set to  0.000000
9/10/2010	11:01:35 AM	H2 MFC set to  500.000000
9/10/2010	11:01:35 AM	BCl3 MFC set to  0.000000
9/10/2010	11:01:35 AM	PHl3 MFC set to  0.000000
9/10/2010	11:01:35 AM	SiCl4 MFC set to  0.000000
9/10/2010	11:01:35 AM	Bypass solenoid MFC set to  0.000000
9/10/2010	11:01:35 AM	Tube furnace set to 0
9/10/2010	11:02:57 AM	Helium valve closed
9/10/2010	11:02:57 AM	BCl3 valve closed
9/10/2010	11:02:57 AM	PH3 valve closed
9/10/2010	11:02:57 AM	SiCl4 pre valve closed
9/10/2010	11:02:57 AM	SiCl4 post valve closed
9/10/2010	11:02:57 AM	Main Vac valve closed
9/10/2010	11:02:57 AM	Bypass valve closed
9/10/2010	11:02:57 AM	H2 valve opened
9/10/2010	11:02:57 AM	Bubbler valve opened
9/10/2010	11:02:57 AM	Helium MFC set to  0.000000
9/10/2010	11:02:57 AM	H2 MFC set to  500.000000
9/10/2010	11:02:57 AM	BCl3 MFC set to  0.000000
9/10/2010	11:02:57 AM	PHl3 MFC set to  0.000000
9/10/2010	11:02:57 AM	SiCl4 MFC set to  0.000000
9/10/2010	11:02:57 AM	Bypass solenoid MFC set to  0.000000
9/10/2010	11:02:57 AM	Tube furnace set to 1000
9/10/2010	11:22:57 AM	Helium valve closed
9/10/2010	11:22:58 AM	BCl3 valve closed
9/10/2010	11:22:58 AM	Main Vac valve closed
9/10/2010	11:22:58 AM	Bypass valve closed
9/10/2010	11:22:58 AM	H2 valve opened
9/10/2010	11:22:58 AM	PH3 valve opened
9/10/2010	11:22:58 AM	SiCl4 pre valve opened
9/10/2010	11:22:58 AM	SiCl4 post valve opened
9/10/2010	11:22:58 AM	Bubbler valve opened
9/10/2010	11:22:58 AM	Helium MFC set to  0.000000
9/10/2010	11:22:58 AM	H2 MFC set to  500.000000
9/10/2010	11:22:58 AM	BCl3 MFC set to  0.000000
9/10/2010	11:22:58 AM	PHl3 MFC set to  1.000000
9/10/2010	11:22:58 AM	SiCl4 MFC set to  50.000000
9/10/2010	11:22:58 AM	Bypass solenoid MFC set to  0.000000
9/10/2010	11:22:58 AM	Tube furnace set to 1000
9/10/2010	11:52:58 AM	H2 valve closed
9/10/2010	11:52:58 AM	BCl3 valve closed
9/10/2010	11:52:58 AM	PH3 valve closed
9/10/2010	11:52:58 AM	SiCl4 pre valve closed
9/10/2010	11:52:58 AM	SiCl4 post valve closed
9/10/2010	11:52:58 AM	Main Vac valve closed
9/10/2010	11:52:58 AM	Bypass valve closed
9/10/2010	11:52:58 AM	Helium valve opened
9/10/2010	11:52:58 AM	Bubbler valve opened
9/10/2010	11:52:58 AM	Helium MFC set to  500.000000
9/10/2010	11:52:58 AM	H2 MFC set to  0.000000
9/10/2010	11:52:58 AM	BCl3 MFC set to  0.000000
9/10/2010	11:52:58 AM	PHl3 MFC set to  0.000000
9/10/2010	11:52:58 AM	SiCl4 MFC set to  0.000000
9/10/2010	11:52:58 AM	Bypass solenoid MFC set to  0.000000
9/10/2010	11:52:58 AM	Tube furnace set to 0
9/10/2010	12:12:58 PM	Helium valve closed
9/10/2010	12:12:58 PM	H2 valve closed
9/10/2010	12:12:58 PM	BCl3 valve closed
9/10/2010	12:12:58 PM	PH3 valve closed
9/10/2010	12:12:58 PM	SiCl4 pre valve closed
9/10/2010	12:12:58 PM	SiCl4 post valve closed
9/10/2010	12:12:58 PM	Main Vac valve closed
9/10/2010	12:12:58 PM	Bypass valve closed
9/10/2010	12:12:58 PM	Bubbler valve closed
9/10/2010	12:12:58 PM	Helium MFC set to  0.000000
9/10/2010	12:12:58 PM	H2 MFC set to  0.000000
9/10/2010	12:12:58 PM	BCl3 MFC set to  0.000000
9/10/2010	12:12:58 PM	PHl3 MFC set to  0.000000
9/10/2010	12:12:58 PM	SiCl4 MFC set to  0.000000
9/10/2010	12:12:58 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:12:58 PM	Tube furnace set to 0
9/10/2010	12:12:58 PM	Run finished at 12:12 PM
9/10/2010	12:26:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/10/2010	12:26:25 PM	Recipe started at 12:26 PM
9/10/2010	12:26:26 PM	Helium valve closed
9/10/2010	12:26:26 PM	H2 valve closed
9/10/2010	12:26:26 PM	BCl3 valve closed
9/10/2010	12:26:26 PM	PH3 valve closed
9/10/2010	12:26:26 PM	SiCl4 pre valve closed
9/10/2010	12:26:26 PM	SiCl4 post valve closed
9/10/2010	12:26:26 PM	Main Vac valve closed
9/10/2010	12:26:26 PM	Bubbler valve closed
9/10/2010	12:26:26 PM	Bypass valve opened
9/10/2010	12:26:26 PM	Helium MFC set to  0.000000
9/10/2010	12:26:26 PM	H2 MFC set to  0.000000
9/10/2010	12:26:26 PM	BCl3 MFC set to  0.000000
9/10/2010	12:26:26 PM	PHl3 MFC set to  0.000000
9/10/2010	12:26:26 PM	SiCl4 MFC set to  0.000000
9/10/2010	12:26:26 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:26:26 PM	Tube furnace set to 0
9/10/2010	12:27:07 PM	Helium valve closed
9/10/2010	12:27:07 PM	H2 valve closed
9/10/2010	12:27:07 PM	BCl3 valve closed
9/10/2010	12:27:07 PM	PH3 valve closed
9/10/2010	12:27:07 PM	SiCl4 pre valve closed
9/10/2010	12:27:07 PM	SiCl4 post valve closed
9/10/2010	12:27:07 PM	Bubbler valve closed
9/10/2010	12:27:07 PM	Main Vac valve opened
9/10/2010	12:27:07 PM	Bypass valve opened
9/10/2010	12:27:07 PM	Helium MFC set to  0.000000
9/10/2010	12:27:07 PM	H2 MFC set to  0.000000
9/10/2010	12:27:07 PM	BCl3 MFC set to  0.000000
9/10/2010	12:27:07 PM	PHl3 MFC set to  0.000000
9/10/2010	12:27:07 PM	SiCl4 MFC set to  0.000000
9/10/2010	12:27:07 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:27:07 PM	Tube furnace set to 0
9/10/2010	12:27:07 PM	Run finished at 12:27 PM
9/10/2010	12:27:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/10/2010	12:27:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/10/2010	12:27:39 PM	Recipe started at 12:27 PM
9/10/2010	12:27:39 PM	Helium valve closed
9/10/2010	12:27:39 PM	H2 valve closed
9/10/2010	12:27:39 PM	BCl3 valve closed
9/10/2010	12:27:39 PM	PH3 valve closed
9/10/2010	12:27:39 PM	SiCl4 pre valve closed
9/10/2010	12:27:39 PM	SiCl4 post valve closed
9/10/2010	12:27:39 PM	Main Vac valve closed
9/10/2010	12:27:39 PM	Bubbler valve closed
9/10/2010	12:27:39 PM	Bypass valve opened
9/10/2010	12:27:39 PM	Helium MFC set to  0.000000
9/10/2010	12:27:39 PM	H2 MFC set to  0.000000
9/10/2010	12:27:39 PM	BCl3 MFC set to  0.000000
9/10/2010	12:27:39 PM	PHl3 MFC set to  0.000000
9/10/2010	12:27:39 PM	SiCl4 MFC set to  0.000000
9/10/2010	12:27:39 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:27:39 PM	Tube furnace set to 0
9/10/2010	12:27:39 PM	Helium valve closed
9/10/2010	12:27:39 PM	H2 valve closed
9/10/2010	12:27:39 PM	BCl3 valve closed
9/10/2010	12:27:39 PM	PH3 valve closed
9/10/2010	12:27:39 PM	SiCl4 pre valve closed
9/10/2010	12:27:39 PM	SiCl4 post valve closed
9/10/2010	12:27:39 PM	Bubbler valve closed
9/10/2010	12:27:39 PM	Main Vac valve opened
9/10/2010	12:27:39 PM	Bypass valve opened
9/10/2010	12:27:39 PM	Helium MFC set to  0.000000
9/10/2010	12:27:39 PM	H2 MFC set to  0.000000
9/10/2010	12:27:39 PM	BCl3 MFC set to  0.000000
9/10/2010	12:27:39 PM	PHl3 MFC set to  0.000000
9/10/2010	12:27:39 PM	SiCl4 MFC set to  0.000000
9/10/2010	12:27:39 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:27:39 PM	Tube furnace set to 0
9/10/2010	12:28:40 PM	H2 valve closed
9/10/2010	12:28:40 PM	BCl3 valve closed
9/10/2010	12:28:40 PM	PH3 valve closed
9/10/2010	12:28:40 PM	SiCl4 pre valve closed
9/10/2010	12:28:40 PM	SiCl4 post valve closed
9/10/2010	12:28:40 PM	Bubbler valve closed
9/10/2010	12:28:40 PM	Helium valve opened
9/10/2010	12:28:40 PM	Main Vac valve opened
9/10/2010	12:28:40 PM	Bypass valve opened
9/10/2010	12:28:40 PM	Helium MFC set to  100.000000
9/10/2010	12:28:40 PM	H2 MFC set to  0.000000
9/10/2010	12:28:40 PM	BCl3 MFC set to  0.000000
9/10/2010	12:28:40 PM	PHl3 MFC set to  0.000000
9/10/2010	12:28:40 PM	SiCl4 MFC set to  0.000000
9/10/2010	12:28:40 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:28:40 PM	Tube furnace set to 0
9/10/2010	12:29:40 PM	Helium valve closed
9/10/2010	12:29:40 PM	H2 valve closed
9/10/2010	12:29:40 PM	BCl3 valve closed
9/10/2010	12:29:40 PM	PH3 valve closed
9/10/2010	12:29:40 PM	SiCl4 pre valve closed
9/10/2010	12:29:40 PM	SiCl4 post valve closed
9/10/2010	12:29:40 PM	Bubbler valve closed
9/10/2010	12:29:40 PM	Main Vac valve opened
9/10/2010	12:29:40 PM	Bypass valve opened
9/10/2010	12:29:40 PM	Helium MFC set to  0.000000
9/10/2010	12:29:40 PM	H2 MFC set to  0.000000
9/10/2010	12:29:40 PM	BCl3 MFC set to  0.000000
9/10/2010	12:29:40 PM	PHl3 MFC set to  0.000000
9/10/2010	12:29:40 PM	SiCl4 MFC set to  0.000000
9/10/2010	12:29:40 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:29:40 PM	Tube furnace set to 0
9/10/2010	12:30:40 PM	H2 valve closed
9/10/2010	12:30:40 PM	BCl3 valve closed
9/10/2010	12:30:40 PM	PH3 valve closed
9/10/2010	12:30:40 PM	SiCl4 pre valve closed
9/10/2010	12:30:40 PM	SiCl4 post valve closed
9/10/2010	12:30:40 PM	Bubbler valve closed
9/10/2010	12:30:40 PM	Helium valve opened
9/10/2010	12:30:40 PM	Main Vac valve opened
9/10/2010	12:30:40 PM	Bypass valve opened
9/10/2010	12:30:40 PM	Helium MFC set to  100.000000
9/10/2010	12:30:40 PM	H2 MFC set to  0.000000
9/10/2010	12:30:40 PM	BCl3 MFC set to  0.000000
9/10/2010	12:30:40 PM	PHl3 MFC set to  0.000000
9/10/2010	12:30:40 PM	SiCl4 MFC set to  0.000000
9/10/2010	12:30:40 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:30:40 PM	Tube furnace set to 0
9/10/2010	12:31:40 PM	Helium valve closed
9/10/2010	12:31:40 PM	H2 valve closed
9/10/2010	12:31:40 PM	BCl3 valve closed
9/10/2010	12:31:40 PM	PH3 valve closed
9/10/2010	12:31:40 PM	SiCl4 pre valve closed
9/10/2010	12:31:40 PM	SiCl4 post valve closed
9/10/2010	12:31:40 PM	Bubbler valve closed
9/10/2010	12:31:40 PM	Main Vac valve opened
9/10/2010	12:31:40 PM	Bypass valve opened
9/10/2010	12:31:40 PM	Helium MFC set to  0.000000
9/10/2010	12:31:40 PM	H2 MFC set to  0.000000
9/10/2010	12:31:40 PM	BCl3 MFC set to  0.000000
9/10/2010	12:31:40 PM	PHl3 MFC set to  0.000000
9/10/2010	12:31:40 PM	SiCl4 MFC set to  0.000000
9/10/2010	12:31:40 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:31:40 PM	Tube furnace set to 0
9/10/2010	12:32:40 PM	H2 valve closed
9/10/2010	12:32:40 PM	BCl3 valve closed
9/10/2010	12:32:40 PM	PH3 valve closed
9/10/2010	12:32:40 PM	SiCl4 pre valve closed
9/10/2010	12:32:40 PM	SiCl4 post valve closed
9/10/2010	12:32:40 PM	Bubbler valve closed
9/10/2010	12:32:40 PM	Helium valve opened
9/10/2010	12:32:40 PM	Main Vac valve opened
9/10/2010	12:32:40 PM	Bypass valve opened
9/10/2010	12:32:40 PM	Helium MFC set to  100.000000
9/10/2010	12:32:40 PM	H2 MFC set to  0.000000
9/10/2010	12:32:40 PM	BCl3 MFC set to  0.000000
9/10/2010	12:32:40 PM	PHl3 MFC set to  0.000000
9/10/2010	12:32:40 PM	SiCl4 MFC set to  0.000000
9/10/2010	12:32:40 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:32:41 PM	Tube furnace set to 0
9/10/2010	12:33:41 PM	Helium valve closed
9/10/2010	12:33:41 PM	H2 valve closed
9/10/2010	12:33:41 PM	BCl3 valve closed
9/10/2010	12:33:41 PM	PH3 valve closed
9/10/2010	12:33:41 PM	SiCl4 pre valve closed
9/10/2010	12:33:41 PM	SiCl4 post valve closed
9/10/2010	12:33:41 PM	Bubbler valve closed
9/10/2010	12:33:41 PM	Main Vac valve opened
9/10/2010	12:33:41 PM	Bypass valve opened
9/10/2010	12:33:41 PM	Helium MFC set to  0.000000
9/10/2010	12:33:41 PM	H2 MFC set to  0.000000
9/10/2010	12:33:41 PM	BCl3 MFC set to  0.000000
9/10/2010	12:33:41 PM	PHl3 MFC set to  0.000000
9/10/2010	12:33:41 PM	SiCl4 MFC set to  0.000000
9/10/2010	12:33:41 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:33:41 PM	Tube furnace set to 0
9/10/2010	12:34:41 PM	H2 valve closed
9/10/2010	12:34:41 PM	BCl3 valve closed
9/10/2010	12:34:41 PM	PH3 valve closed
9/10/2010	12:34:41 PM	SiCl4 pre valve closed
9/10/2010	12:34:41 PM	SiCl4 post valve closed
9/10/2010	12:34:41 PM	Bubbler valve closed
9/10/2010	12:34:41 PM	Helium valve opened
9/10/2010	12:34:41 PM	Main Vac valve opened
9/10/2010	12:34:41 PM	Bypass valve opened
9/10/2010	12:34:41 PM	Helium MFC set to  100.000000
9/10/2010	12:34:41 PM	H2 MFC set to  0.000000
9/10/2010	12:34:41 PM	BCl3 MFC set to  0.000000
9/10/2010	12:34:41 PM	PHl3 MFC set to  0.000000
9/10/2010	12:34:41 PM	SiCl4 MFC set to  0.000000
9/10/2010	12:34:41 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:34:41 PM	Tube furnace set to 0
9/10/2010	12:35:41 PM	Helium valve closed
9/10/2010	12:35:41 PM	H2 valve closed
9/10/2010	12:35:41 PM	BCl3 valve closed
9/10/2010	12:35:41 PM	PH3 valve closed
9/10/2010	12:35:41 PM	SiCl4 pre valve closed
9/10/2010	12:35:41 PM	SiCl4 post valve closed
9/10/2010	12:35:41 PM	Bubbler valve closed
9/10/2010	12:35:41 PM	Main Vac valve opened
9/10/2010	12:35:41 PM	Bypass valve opened
9/10/2010	12:35:41 PM	Helium MFC set to  0.000000
9/10/2010	12:35:41 PM	H2 MFC set to  0.000000
9/10/2010	12:35:41 PM	BCl3 MFC set to  0.000000
9/10/2010	12:35:41 PM	PHl3 MFC set to  0.000000
9/10/2010	12:35:41 PM	SiCl4 MFC set to  0.000000
9/10/2010	12:35:41 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:35:41 PM	Tube furnace set to 0
9/10/2010	12:36:41 PM	H2 valve closed
9/10/2010	12:36:41 PM	BCl3 valve closed
9/10/2010	12:36:41 PM	PH3 valve closed
9/10/2010	12:36:41 PM	SiCl4 pre valve closed
9/10/2010	12:36:41 PM	SiCl4 post valve closed
9/10/2010	12:36:41 PM	Bubbler valve closed
9/10/2010	12:36:41 PM	Helium valve opened
9/10/2010	12:36:41 PM	Main Vac valve opened
9/10/2010	12:36:41 PM	Bypass valve opened
9/10/2010	12:36:41 PM	Helium MFC set to  100.000000
9/10/2010	12:36:41 PM	H2 MFC set to  0.000000
9/10/2010	12:36:41 PM	BCl3 MFC set to  0.000000
9/10/2010	12:36:41 PM	PHl3 MFC set to  0.000000
9/10/2010	12:36:41 PM	SiCl4 MFC set to  0.000000
9/10/2010	12:36:41 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:36:41 PM	Tube furnace set to 0
9/10/2010	12:37:41 PM	Helium valve closed
9/10/2010	12:37:41 PM	H2 valve closed
9/10/2010	12:37:41 PM	BCl3 valve closed
9/10/2010	12:37:41 PM	PH3 valve closed
9/10/2010	12:37:41 PM	SiCl4 pre valve closed
9/10/2010	12:37:41 PM	SiCl4 post valve closed
9/10/2010	12:37:41 PM	Bubbler valve closed
9/10/2010	12:37:41 PM	Main Vac valve opened
9/10/2010	12:37:41 PM	Bypass valve opened
9/10/2010	12:37:41 PM	Helium MFC set to  0.000000
9/10/2010	12:37:41 PM	H2 MFC set to  0.000000
9/10/2010	12:37:41 PM	BCl3 MFC set to  0.000000
9/10/2010	12:37:41 PM	PHl3 MFC set to  0.000000
9/10/2010	12:37:41 PM	SiCl4 MFC set to  0.000000
9/10/2010	12:37:41 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:37:41 PM	Tube furnace set to 0
9/10/2010	12:38:42 PM	H2 valve closed
9/10/2010	12:38:42 PM	BCl3 valve closed
9/10/2010	12:38:42 PM	PH3 valve closed
9/10/2010	12:38:42 PM	SiCl4 pre valve closed
9/10/2010	12:38:42 PM	SiCl4 post valve closed
9/10/2010	12:38:42 PM	Bubbler valve closed
9/10/2010	12:38:42 PM	Helium valve opened
9/10/2010	12:38:42 PM	Main Vac valve opened
9/10/2010	12:38:42 PM	Bypass valve opened
9/10/2010	12:38:42 PM	Helium MFC set to  100.000000
9/10/2010	12:38:42 PM	H2 MFC set to  0.000000
9/10/2010	12:38:42 PM	BCl3 MFC set to  0.000000
9/10/2010	12:38:42 PM	PHl3 MFC set to  0.000000
9/10/2010	12:38:42 PM	SiCl4 MFC set to  0.000000
9/10/2010	12:38:42 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:38:42 PM	Tube furnace set to 0
9/10/2010	12:39:42 PM	Helium valve closed
9/10/2010	12:39:42 PM	H2 valve closed
9/10/2010	12:39:42 PM	BCl3 valve closed
9/10/2010	12:39:42 PM	PH3 valve closed
9/10/2010	12:39:42 PM	SiCl4 pre valve closed
9/10/2010	12:39:42 PM	SiCl4 post valve closed
9/10/2010	12:39:42 PM	Bubbler valve closed
9/10/2010	12:39:42 PM	Main Vac valve opened
9/10/2010	12:39:42 PM	Bypass valve opened
9/10/2010	12:39:42 PM	Helium MFC set to  0.000000
9/10/2010	12:39:42 PM	H2 MFC set to  0.000000
9/10/2010	12:39:42 PM	BCl3 MFC set to  0.000000
9/10/2010	12:39:42 PM	PHl3 MFC set to  0.000000
9/10/2010	12:39:42 PM	SiCl4 MFC set to  0.000000
9/10/2010	12:39:42 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:39:42 PM	Tube furnace set to 0
9/10/2010	12:40:42 PM	H2 valve closed
9/10/2010	12:40:42 PM	BCl3 valve closed
9/10/2010	12:40:42 PM	PH3 valve closed
9/10/2010	12:40:42 PM	SiCl4 pre valve closed
9/10/2010	12:40:42 PM	SiCl4 post valve closed
9/10/2010	12:40:42 PM	Bubbler valve closed
9/10/2010	12:40:42 PM	Helium valve opened
9/10/2010	12:40:42 PM	Main Vac valve opened
9/10/2010	12:40:42 PM	Bypass valve opened
9/10/2010	12:40:42 PM	Helium MFC set to  100.000000
9/10/2010	12:40:42 PM	H2 MFC set to  0.000000
9/10/2010	12:40:42 PM	BCl3 MFC set to  0.000000
9/10/2010	12:40:42 PM	PHl3 MFC set to  0.000000
9/10/2010	12:40:42 PM	SiCl4 MFC set to  0.000000
9/10/2010	12:40:42 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:40:42 PM	Tube furnace set to 0
9/10/2010	12:41:42 PM	Helium valve closed
9/10/2010	12:41:42 PM	H2 valve closed
9/10/2010	12:41:42 PM	BCl3 valve closed
9/10/2010	12:41:42 PM	PH3 valve closed
9/10/2010	12:41:42 PM	SiCl4 pre valve closed
9/10/2010	12:41:42 PM	SiCl4 post valve closed
9/10/2010	12:41:42 PM	Bubbler valve closed
9/10/2010	12:41:42 PM	Main Vac valve opened
9/10/2010	12:41:42 PM	Bypass valve opened
9/10/2010	12:41:42 PM	Helium MFC set to  0.000000
9/10/2010	12:41:42 PM	H2 MFC set to  0.000000
9/10/2010	12:41:42 PM	BCl3 MFC set to  0.000000
9/10/2010	12:41:42 PM	PHl3 MFC set to  0.000000
9/10/2010	12:41:42 PM	SiCl4 MFC set to  0.000000
9/10/2010	12:41:42 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:41:42 PM	Tube furnace set to 0
9/10/2010	12:42:42 PM	H2 valve closed
9/10/2010	12:42:42 PM	BCl3 valve closed
9/10/2010	12:42:42 PM	PH3 valve closed
9/10/2010	12:42:42 PM	SiCl4 pre valve closed
9/10/2010	12:42:42 PM	SiCl4 post valve closed
9/10/2010	12:42:42 PM	Bubbler valve closed
9/10/2010	12:42:42 PM	Helium valve opened
9/10/2010	12:42:42 PM	Main Vac valve opened
9/10/2010	12:42:42 PM	Bypass valve opened
9/10/2010	12:42:42 PM	Helium MFC set to  100.000000
9/10/2010	12:42:42 PM	H2 MFC set to  0.000000
9/10/2010	12:42:42 PM	BCl3 MFC set to  0.000000
9/10/2010	12:42:42 PM	PHl3 MFC set to  0.000000
9/10/2010	12:42:42 PM	SiCl4 MFC set to  0.000000
9/10/2010	12:42:42 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:42:42 PM	Tube furnace set to 0
9/10/2010	12:43:43 PM	Helium valve closed
9/10/2010	12:43:43 PM	H2 valve closed
9/10/2010	12:43:43 PM	BCl3 valve closed
9/10/2010	12:43:43 PM	PH3 valve closed
9/10/2010	12:43:43 PM	SiCl4 pre valve closed
9/10/2010	12:43:43 PM	SiCl4 post valve closed
9/10/2010	12:43:43 PM	Bubbler valve closed
9/10/2010	12:43:43 PM	Main Vac valve opened
9/10/2010	12:43:43 PM	Bypass valve opened
9/10/2010	12:43:43 PM	Helium MFC set to  0.000000
9/10/2010	12:43:43 PM	H2 MFC set to  0.000000
9/10/2010	12:43:43 PM	BCl3 MFC set to  0.000000
9/10/2010	12:43:43 PM	PHl3 MFC set to  0.000000
9/10/2010	12:43:43 PM	SiCl4 MFC set to  0.000000
9/10/2010	12:43:43 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:43:43 PM	Tube furnace set to 0
9/10/2010	12:44:43 PM	H2 valve closed
9/10/2010	12:44:43 PM	BCl3 valve closed
9/10/2010	12:44:43 PM	PH3 valve closed
9/10/2010	12:44:43 PM	SiCl4 pre valve closed
9/10/2010	12:44:43 PM	SiCl4 post valve closed
9/10/2010	12:44:43 PM	Bubbler valve closed
9/10/2010	12:44:43 PM	Helium valve opened
9/10/2010	12:44:43 PM	Main Vac valve opened
9/10/2010	12:44:43 PM	Bypass valve opened
9/10/2010	12:44:43 PM	Helium MFC set to  100.000000
9/10/2010	12:44:43 PM	H2 MFC set to  0.000000
9/10/2010	12:44:43 PM	BCl3 MFC set to  0.000000
9/10/2010	12:44:43 PM	PHl3 MFC set to  0.000000
9/10/2010	12:44:43 PM	SiCl4 MFC set to  0.000000
9/10/2010	12:44:43 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:44:43 PM	Tube furnace set to 0
9/10/2010	12:45:43 PM	Helium valve closed
9/10/2010	12:45:43 PM	H2 valve closed
9/10/2010	12:45:43 PM	BCl3 valve closed
9/10/2010	12:45:43 PM	PH3 valve closed
9/10/2010	12:45:43 PM	SiCl4 pre valve closed
9/10/2010	12:45:43 PM	SiCl4 post valve closed
9/10/2010	12:45:43 PM	Bubbler valve closed
9/10/2010	12:45:43 PM	Main Vac valve opened
9/10/2010	12:45:43 PM	Bypass valve opened
9/10/2010	12:45:43 PM	Helium MFC set to  0.000000
9/10/2010	12:45:43 PM	H2 MFC set to  0.000000
9/10/2010	12:45:43 PM	BCl3 MFC set to  0.000000
9/10/2010	12:45:43 PM	PHl3 MFC set to  0.000000
9/10/2010	12:45:43 PM	SiCl4 MFC set to  0.000000
9/10/2010	12:45:43 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:45:43 PM	Tube furnace set to 0
9/10/2010	12:46:43 PM	H2 valve closed
9/10/2010	12:46:43 PM	BCl3 valve closed
9/10/2010	12:46:43 PM	PH3 valve closed
9/10/2010	12:46:43 PM	SiCl4 pre valve closed
9/10/2010	12:46:43 PM	SiCl4 post valve closed
9/10/2010	12:46:43 PM	Bubbler valve closed
9/10/2010	12:46:43 PM	Helium valve opened
9/10/2010	12:46:43 PM	Main Vac valve opened
9/10/2010	12:46:43 PM	Bypass valve opened
9/10/2010	12:46:43 PM	Helium MFC set to  100.000000
9/10/2010	12:46:43 PM	H2 MFC set to  0.000000
9/10/2010	12:46:43 PM	BCl3 MFC set to  0.000000
9/10/2010	12:46:43 PM	PHl3 MFC set to  0.000000
9/10/2010	12:46:43 PM	SiCl4 MFC set to  0.000000
9/10/2010	12:46:43 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:46:43 PM	Tube furnace set to 0
9/10/2010	12:47:43 PM	Helium valve closed
9/10/2010	12:47:43 PM	H2 valve closed
9/10/2010	12:47:43 PM	BCl3 valve closed
9/10/2010	12:47:43 PM	PH3 valve closed
9/10/2010	12:47:43 PM	SiCl4 pre valve closed
9/10/2010	12:47:43 PM	SiCl4 post valve closed
9/10/2010	12:47:43 PM	Bubbler valve closed
9/10/2010	12:47:43 PM	Main Vac valve opened
9/10/2010	12:47:43 PM	Bypass valve opened
9/10/2010	12:47:43 PM	Helium MFC set to  0.000000
9/10/2010	12:47:43 PM	H2 MFC set to  0.000000
9/10/2010	12:47:43 PM	BCl3 MFC set to  0.000000
9/10/2010	12:47:43 PM	PHl3 MFC set to  0.000000
9/10/2010	12:47:43 PM	SiCl4 MFC set to  0.000000
9/10/2010	12:47:43 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	12:47:44 PM	Tube furnace set to 0
9/10/2010	12:47:45 PM	Run finished at 12:47 PM
9/10/2010	12:47:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/10/2010	1:32:35 PM	Helium valve opened
9/10/2010	1:32:35 PM	Helium valve closed
9/10/2010	1:32:40 PM	Helium MFC set to  100.000000
9/10/2010	1:32:41 PM	Helium valve opened
9/10/2010	1:55:39 PM	Helium valve closed
9/10/2010	1:55:44 PM	Helium MFC set to  0.000000
9/10/2010	1:56:38 PM	Main Vac valve closed
9/10/2010	1:56:39 PM	Bypass valve closed
9/10/2010	1:57:14 PM	Recipe started at 1:57 PM
9/10/2010	1:57:14 PM	Helium valve closed
9/10/2010	1:57:14 PM	BCl3 valve closed
9/10/2010	1:57:14 PM	PH3 valve closed
9/10/2010	1:57:14 PM	SiCl4 pre valve closed
9/10/2010	1:57:14 PM	SiCl4 post valve closed
9/10/2010	1:57:14 PM	Main Vac valve closed
9/10/2010	1:57:14 PM	Bypass valve closed
9/10/2010	1:57:14 PM	Bubbler valve closed
9/10/2010	1:57:14 PM	H2 valve opened
9/10/2010	1:57:14 PM	Helium MFC set to  0.000000
9/10/2010	1:57:14 PM	H2 MFC set to  500.000000
9/10/2010	1:57:14 PM	BCl3 MFC set to  0.000000
9/10/2010	1:57:14 PM	PHl3 MFC set to  0.000000
9/10/2010	1:57:14 PM	SiCl4 MFC set to  0.000000
9/10/2010	1:57:14 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	1:57:14 PM	Tube furnace set to 0
9/10/2010	1:58:34 PM	Helium valve closed
9/10/2010	1:58:34 PM	BCl3 valve closed
9/10/2010	1:58:34 PM	PH3 valve closed
9/10/2010	1:58:34 PM	SiCl4 pre valve closed
9/10/2010	1:58:34 PM	SiCl4 post valve closed
9/10/2010	1:58:34 PM	Main Vac valve closed
9/10/2010	1:58:34 PM	Bypass valve closed
9/10/2010	1:58:34 PM	H2 valve opened
9/10/2010	1:58:34 PM	Bubbler valve opened
9/10/2010	1:58:34 PM	Helium MFC set to  0.000000
9/10/2010	1:58:34 PM	H2 MFC set to  500.000000
9/10/2010	1:58:34 PM	BCl3 MFC set to  0.000000
9/10/2010	1:58:34 PM	PHl3 MFC set to  0.000000
9/10/2010	1:58:34 PM	SiCl4 MFC set to  0.000000
9/10/2010	1:58:34 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	1:58:34 PM	Tube furnace set to 1000
9/10/2010	2:18:34 PM	Helium valve closed
9/10/2010	2:18:34 PM	BCl3 valve closed
9/10/2010	2:18:34 PM	Main Vac valve closed
9/10/2010	2:18:34 PM	Bypass valve closed
9/10/2010	2:18:34 PM	H2 valve opened
9/10/2010	2:18:34 PM	PH3 valve opened
9/10/2010	2:18:34 PM	SiCl4 pre valve opened
9/10/2010	2:18:34 PM	SiCl4 post valve opened
9/10/2010	2:18:34 PM	Bubbler valve opened
9/10/2010	2:18:34 PM	Helium MFC set to  0.000000
9/10/2010	2:18:34 PM	H2 MFC set to  500.000000
9/10/2010	2:18:34 PM	BCl3 MFC set to  0.000000
9/10/2010	2:18:34 PM	PHl3 MFC set to  1.000000
9/10/2010	2:18:34 PM	SiCl4 MFC set to  50.000000
9/10/2010	2:18:34 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	2:18:34 PM	Tube furnace set to 1000
9/10/2010	2:48:34 PM	H2 valve closed
9/10/2010	2:48:34 PM	BCl3 valve closed
9/10/2010	2:48:34 PM	PH3 valve closed
9/10/2010	2:48:34 PM	SiCl4 pre valve closed
9/10/2010	2:48:34 PM	SiCl4 post valve closed
9/10/2010	2:48:34 PM	Main Vac valve closed
9/10/2010	2:48:34 PM	Bypass valve closed
9/10/2010	2:48:34 PM	Helium valve opened
9/10/2010	2:48:34 PM	Bubbler valve opened
9/10/2010	2:48:34 PM	Helium MFC set to  500.000000
9/10/2010	2:48:34 PM	H2 MFC set to  0.000000
9/10/2010	2:48:34 PM	BCl3 MFC set to  0.000000
9/10/2010	2:48:34 PM	PHl3 MFC set to  0.000000
9/10/2010	2:48:34 PM	SiCl4 MFC set to  0.000000
9/10/2010	2:48:34 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	2:48:34 PM	Tube furnace set to 0
9/10/2010	3:08:34 PM	Helium valve closed
9/10/2010	3:08:34 PM	H2 valve closed
9/10/2010	3:08:34 PM	BCl3 valve closed
9/10/2010	3:08:34 PM	PH3 valve closed
9/10/2010	3:08:34 PM	SiCl4 pre valve closed
9/10/2010	3:08:34 PM	SiCl4 post valve closed
9/10/2010	3:08:34 PM	Main Vac valve closed
9/10/2010	3:08:34 PM	Bypass valve closed
9/10/2010	3:08:34 PM	Bubbler valve closed
9/10/2010	3:08:34 PM	Helium MFC set to  0.000000
9/10/2010	3:08:34 PM	H2 MFC set to  0.000000
9/10/2010	3:08:34 PM	BCl3 MFC set to  0.000000
9/10/2010	3:08:34 PM	PHl3 MFC set to  0.000000
9/10/2010	3:08:34 PM	SiCl4 MFC set to  0.000000
9/10/2010	3:08:34 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	3:08:35 PM	Tube furnace set to 0
9/10/2010	3:08:35 PM	Run finished at 3:08 PM
9/10/2010	4:37:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/10/2010	4:37:27 PM	Recipe started at 4:37 PM
9/10/2010	4:37:27 PM	Helium valve closed
9/10/2010	4:37:27 PM	H2 valve closed
9/10/2010	4:37:27 PM	BCl3 valve closed
9/10/2010	4:37:27 PM	PH3 valve closed
9/10/2010	4:37:27 PM	SiCl4 pre valve closed
9/10/2010	4:37:27 PM	SiCl4 post valve closed
9/10/2010	4:37:27 PM	Main Vac valve closed
9/10/2010	4:37:27 PM	Bubbler valve closed
9/10/2010	4:37:27 PM	Bypass valve opened
9/10/2010	4:37:27 PM	Helium MFC set to  0.000000
9/10/2010	4:37:27 PM	H2 MFC set to  0.000000
9/10/2010	4:37:27 PM	BCl3 MFC set to  0.000000
9/10/2010	4:37:27 PM	PHl3 MFC set to  0.000000
9/10/2010	4:37:27 PM	SiCl4 MFC set to  0.000000
9/10/2010	4:37:27 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	4:37:28 PM	Tube furnace set to 0
9/10/2010	4:38:09 PM	Helium valve closed
9/10/2010	4:38:09 PM	H2 valve closed
9/10/2010	4:38:09 PM	BCl3 valve closed
9/10/2010	4:38:09 PM	PH3 valve closed
9/10/2010	4:38:09 PM	SiCl4 pre valve closed
9/10/2010	4:38:09 PM	SiCl4 post valve closed
9/10/2010	4:38:09 PM	Bubbler valve closed
9/10/2010	4:38:09 PM	Main Vac valve opened
9/10/2010	4:38:09 PM	Bypass valve opened
9/10/2010	4:38:09 PM	Helium MFC set to  0.000000
9/10/2010	4:38:09 PM	H2 MFC set to  0.000000
9/10/2010	4:38:09 PM	BCl3 MFC set to  0.000000
9/10/2010	4:38:09 PM	PHl3 MFC set to  0.000000
9/10/2010	4:38:09 PM	SiCl4 MFC set to  0.000000
9/10/2010	4:38:09 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	4:38:10 PM	Tube furnace set to 0
9/10/2010	4:38:10 PM	Run finished at 4:38 PM
9/10/2010	4:38:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/10/2010	4:39:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/10/2010	4:39:37 PM	Recipe started at 4:39 PM
9/10/2010	4:39:37 PM	Helium valve closed
9/10/2010	4:39:37 PM	H2 valve closed
9/10/2010	4:39:37 PM	BCl3 valve closed
9/10/2010	4:39:37 PM	PH3 valve closed
9/10/2010	4:39:37 PM	SiCl4 pre valve closed
9/10/2010	4:39:37 PM	SiCl4 post valve closed
9/10/2010	4:39:37 PM	Main Vac valve closed
9/10/2010	4:39:37 PM	Bubbler valve closed
9/10/2010	4:39:37 PM	Bypass valve opened
9/10/2010	4:39:37 PM	Helium MFC set to  0.000000
9/10/2010	4:39:37 PM	H2 MFC set to  0.000000
9/10/2010	4:39:37 PM	BCl3 MFC set to  0.000000
9/10/2010	4:39:37 PM	PHl3 MFC set to  0.000000
9/10/2010	4:39:37 PM	SiCl4 MFC set to  0.000000
9/10/2010	4:39:37 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	4:39:37 PM	Tube furnace set to 0
9/10/2010	4:39:37 PM	Helium valve closed
9/10/2010	4:39:37 PM	H2 valve closed
9/10/2010	4:39:37 PM	BCl3 valve closed
9/10/2010	4:39:37 PM	PH3 valve closed
9/10/2010	4:39:37 PM	SiCl4 pre valve closed
9/10/2010	4:39:37 PM	SiCl4 post valve closed
9/10/2010	4:39:37 PM	Bubbler valve closed
9/10/2010	4:39:37 PM	Main Vac valve opened
9/10/2010	4:39:37 PM	Bypass valve opened
9/10/2010	4:39:37 PM	Helium MFC set to  0.000000
9/10/2010	4:39:37 PM	H2 MFC set to  0.000000
9/10/2010	4:39:37 PM	BCl3 MFC set to  0.000000
9/10/2010	4:39:37 PM	PHl3 MFC set to  0.000000
9/10/2010	4:39:37 PM	SiCl4 MFC set to  0.000000
9/10/2010	4:39:37 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	4:39:37 PM	Tube furnace set to 0
9/10/2010	4:40:37 PM	H2 valve closed
9/10/2010	4:40:37 PM	BCl3 valve closed
9/10/2010	4:40:37 PM	PH3 valve closed
9/10/2010	4:40:37 PM	SiCl4 pre valve closed
9/10/2010	4:40:37 PM	SiCl4 post valve closed
9/10/2010	4:40:37 PM	Bubbler valve closed
9/10/2010	4:40:37 PM	Helium valve opened
9/10/2010	4:40:37 PM	Main Vac valve opened
9/10/2010	4:40:37 PM	Bypass valve opened
9/10/2010	4:40:37 PM	Helium MFC set to  100.000000
9/10/2010	4:40:37 PM	H2 MFC set to  0.000000
9/10/2010	4:40:37 PM	BCl3 MFC set to  0.000000
9/10/2010	4:40:37 PM	PHl3 MFC set to  0.000000
9/10/2010	4:40:37 PM	SiCl4 MFC set to  0.000000
9/10/2010	4:40:37 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	4:40:37 PM	Tube furnace set to 0
9/10/2010	4:41:38 PM	Helium valve closed
9/10/2010	4:41:38 PM	H2 valve closed
9/10/2010	4:41:38 PM	BCl3 valve closed
9/10/2010	4:41:38 PM	PH3 valve closed
9/10/2010	4:41:38 PM	SiCl4 pre valve closed
9/10/2010	4:41:38 PM	SiCl4 post valve closed
9/10/2010	4:41:38 PM	Bubbler valve closed
9/10/2010	4:41:38 PM	Main Vac valve opened
9/10/2010	4:41:38 PM	Bypass valve opened
9/10/2010	4:41:38 PM	Helium MFC set to  0.000000
9/10/2010	4:41:38 PM	H2 MFC set to  0.000000
9/10/2010	4:41:38 PM	BCl3 MFC set to  0.000000
9/10/2010	4:41:38 PM	PHl3 MFC set to  0.000000
9/10/2010	4:41:38 PM	SiCl4 MFC set to  0.000000
9/10/2010	4:41:38 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	4:41:38 PM	Tube furnace set to 0
9/10/2010	4:42:38 PM	H2 valve closed
9/10/2010	4:42:38 PM	BCl3 valve closed
9/10/2010	4:42:38 PM	PH3 valve closed
9/10/2010	4:42:38 PM	SiCl4 pre valve closed
9/10/2010	4:42:38 PM	SiCl4 post valve closed
9/10/2010	4:42:38 PM	Bubbler valve closed
9/10/2010	4:42:38 PM	Helium valve opened
9/10/2010	4:42:38 PM	Main Vac valve opened
9/10/2010	4:42:38 PM	Bypass valve opened
9/10/2010	4:42:38 PM	Helium MFC set to  100.000000
9/10/2010	4:42:38 PM	H2 MFC set to  0.000000
9/10/2010	4:42:38 PM	BCl3 MFC set to  0.000000
9/10/2010	4:42:38 PM	PHl3 MFC set to  0.000000
9/10/2010	4:42:38 PM	SiCl4 MFC set to  0.000000
9/10/2010	4:42:38 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	4:42:38 PM	Tube furnace set to 0
9/10/2010	4:43:38 PM	Helium valve closed
9/10/2010	4:43:38 PM	H2 valve closed
9/10/2010	4:43:38 PM	BCl3 valve closed
9/10/2010	4:43:38 PM	PH3 valve closed
9/10/2010	4:43:38 PM	SiCl4 pre valve closed
9/10/2010	4:43:38 PM	SiCl4 post valve closed
9/10/2010	4:43:38 PM	Bubbler valve closed
9/10/2010	4:43:38 PM	Main Vac valve opened
9/10/2010	4:43:38 PM	Bypass valve opened
9/10/2010	4:43:38 PM	Helium MFC set to  0.000000
9/10/2010	4:43:38 PM	H2 MFC set to  0.000000
9/10/2010	4:43:38 PM	BCl3 MFC set to  0.000000
9/10/2010	4:43:38 PM	PHl3 MFC set to  0.000000
9/10/2010	4:43:38 PM	SiCl4 MFC set to  0.000000
9/10/2010	4:43:38 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	4:43:38 PM	Tube furnace set to 0
9/10/2010	4:44:38 PM	H2 valve closed
9/10/2010	4:44:38 PM	BCl3 valve closed
9/10/2010	4:44:38 PM	PH3 valve closed
9/10/2010	4:44:38 PM	SiCl4 pre valve closed
9/10/2010	4:44:38 PM	SiCl4 post valve closed
9/10/2010	4:44:38 PM	Bubbler valve closed
9/10/2010	4:44:38 PM	Helium valve opened
9/10/2010	4:44:38 PM	Main Vac valve opened
9/10/2010	4:44:38 PM	Bypass valve opened
9/10/2010	4:44:38 PM	Helium MFC set to  100.000000
9/10/2010	4:44:38 PM	H2 MFC set to  0.000000
9/10/2010	4:44:38 PM	BCl3 MFC set to  0.000000
9/10/2010	4:44:38 PM	PHl3 MFC set to  0.000000
9/10/2010	4:44:38 PM	SiCl4 MFC set to  0.000000
9/10/2010	4:44:38 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	4:44:38 PM	Tube furnace set to 0
9/10/2010	4:45:38 PM	Helium valve closed
9/10/2010	4:45:38 PM	H2 valve closed
9/10/2010	4:45:38 PM	BCl3 valve closed
9/10/2010	4:45:38 PM	PH3 valve closed
9/10/2010	4:45:38 PM	SiCl4 pre valve closed
9/10/2010	4:45:38 PM	SiCl4 post valve closed
9/10/2010	4:45:38 PM	Bubbler valve closed
9/10/2010	4:45:38 PM	Main Vac valve opened
9/10/2010	4:45:38 PM	Bypass valve opened
9/10/2010	4:45:38 PM	Helium MFC set to  0.000000
9/10/2010	4:45:38 PM	H2 MFC set to  0.000000
9/10/2010	4:45:38 PM	BCl3 MFC set to  0.000000
9/10/2010	4:45:38 PM	PHl3 MFC set to  0.000000
9/10/2010	4:45:38 PM	SiCl4 MFC set to  0.000000
9/10/2010	4:45:38 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	4:45:39 PM	Tube furnace set to 0
9/10/2010	4:46:39 PM	H2 valve closed
9/10/2010	4:46:39 PM	BCl3 valve closed
9/10/2010	4:46:39 PM	PH3 valve closed
9/10/2010	4:46:39 PM	SiCl4 pre valve closed
9/10/2010	4:46:39 PM	SiCl4 post valve closed
9/10/2010	4:46:39 PM	Bubbler valve closed
9/10/2010	4:46:39 PM	Helium valve opened
9/10/2010	4:46:39 PM	Main Vac valve opened
9/10/2010	4:46:39 PM	Bypass valve opened
9/10/2010	4:46:39 PM	Helium MFC set to  100.000000
9/10/2010	4:46:39 PM	H2 MFC set to  0.000000
9/10/2010	4:46:39 PM	BCl3 MFC set to  0.000000
9/10/2010	4:46:39 PM	PHl3 MFC set to  0.000000
9/10/2010	4:46:39 PM	SiCl4 MFC set to  0.000000
9/10/2010	4:46:39 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	4:46:39 PM	Tube furnace set to 0
9/10/2010	4:47:39 PM	Helium valve closed
9/10/2010	4:47:39 PM	H2 valve closed
9/10/2010	4:47:39 PM	BCl3 valve closed
9/10/2010	4:47:39 PM	PH3 valve closed
9/10/2010	4:47:39 PM	SiCl4 pre valve closed
9/10/2010	4:47:39 PM	SiCl4 post valve closed
9/10/2010	4:47:39 PM	Bubbler valve closed
9/10/2010	4:47:39 PM	Main Vac valve opened
9/10/2010	4:47:39 PM	Bypass valve opened
9/10/2010	4:47:39 PM	Helium MFC set to  0.000000
9/10/2010	4:47:39 PM	H2 MFC set to  0.000000
9/10/2010	4:47:39 PM	BCl3 MFC set to  0.000000
9/10/2010	4:47:39 PM	PHl3 MFC set to  0.000000
9/10/2010	4:47:39 PM	SiCl4 MFC set to  0.000000
9/10/2010	4:47:39 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	4:47:39 PM	Tube furnace set to 0
9/10/2010	4:48:39 PM	H2 valve closed
9/10/2010	4:48:39 PM	BCl3 valve closed
9/10/2010	4:48:39 PM	PH3 valve closed
9/10/2010	4:48:39 PM	SiCl4 pre valve closed
9/10/2010	4:48:39 PM	SiCl4 post valve closed
9/10/2010	4:48:39 PM	Bubbler valve closed
9/10/2010	4:48:39 PM	Helium valve opened
9/10/2010	4:48:39 PM	Main Vac valve opened
9/10/2010	4:48:39 PM	Bypass valve opened
9/10/2010	4:48:39 PM	Helium MFC set to  100.000000
9/10/2010	4:48:39 PM	H2 MFC set to  0.000000
9/10/2010	4:48:39 PM	BCl3 MFC set to  0.000000
9/10/2010	4:48:39 PM	PHl3 MFC set to  0.000000
9/10/2010	4:48:39 PM	SiCl4 MFC set to  0.000000
9/10/2010	4:48:39 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	4:48:39 PM	Tube furnace set to 0
9/10/2010	4:49:39 PM	Helium valve closed
9/10/2010	4:49:39 PM	H2 valve closed
9/10/2010	4:49:39 PM	BCl3 valve closed
9/10/2010	4:49:39 PM	PH3 valve closed
9/10/2010	4:49:39 PM	SiCl4 pre valve closed
9/10/2010	4:49:39 PM	SiCl4 post valve closed
9/10/2010	4:49:39 PM	Bubbler valve closed
9/10/2010	4:49:39 PM	Main Vac valve opened
9/10/2010	4:49:39 PM	Bypass valve opened
9/10/2010	4:49:39 PM	Helium MFC set to  0.000000
9/10/2010	4:49:39 PM	H2 MFC set to  0.000000
9/10/2010	4:49:39 PM	BCl3 MFC set to  0.000000
9/10/2010	4:49:39 PM	PHl3 MFC set to  0.000000
9/10/2010	4:49:39 PM	SiCl4 MFC set to  0.000000
9/10/2010	4:49:39 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	4:49:39 PM	Tube furnace set to 0
9/10/2010	4:50:39 PM	H2 valve closed
9/10/2010	4:50:39 PM	BCl3 valve closed
9/10/2010	4:50:39 PM	PH3 valve closed
9/10/2010	4:50:39 PM	SiCl4 pre valve closed
9/10/2010	4:50:39 PM	SiCl4 post valve closed
9/10/2010	4:50:39 PM	Bubbler valve closed
9/10/2010	4:50:39 PM	Helium valve opened
9/10/2010	4:50:39 PM	Main Vac valve opened
9/10/2010	4:50:39 PM	Bypass valve opened
9/10/2010	4:50:39 PM	Helium MFC set to  100.000000
9/10/2010	4:50:39 PM	H2 MFC set to  0.000000
9/10/2010	4:50:39 PM	BCl3 MFC set to  0.000000
9/10/2010	4:50:39 PM	PHl3 MFC set to  0.000000
9/10/2010	4:50:39 PM	SiCl4 MFC set to  0.000000
9/10/2010	4:50:39 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	4:50:40 PM	Tube furnace set to 0
9/10/2010	4:51:40 PM	Helium valve closed
9/10/2010	4:51:40 PM	H2 valve closed
9/10/2010	4:51:40 PM	BCl3 valve closed
9/10/2010	4:51:40 PM	PH3 valve closed
9/10/2010	4:51:40 PM	SiCl4 pre valve closed
9/10/2010	4:51:40 PM	SiCl4 post valve closed
9/10/2010	4:51:40 PM	Bubbler valve closed
9/10/2010	4:51:40 PM	Main Vac valve opened
9/10/2010	4:51:40 PM	Bypass valve opened
9/10/2010	4:51:40 PM	Helium MFC set to  0.000000
9/10/2010	4:51:40 PM	H2 MFC set to  0.000000
9/10/2010	4:51:40 PM	BCl3 MFC set to  0.000000
9/10/2010	4:51:40 PM	PHl3 MFC set to  0.000000
9/10/2010	4:51:40 PM	SiCl4 MFC set to  0.000000
9/10/2010	4:51:40 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	4:51:40 PM	Tube furnace set to 0
9/10/2010	4:52:40 PM	H2 valve closed
9/10/2010	4:52:40 PM	BCl3 valve closed
9/10/2010	4:52:40 PM	PH3 valve closed
9/10/2010	4:52:40 PM	SiCl4 pre valve closed
9/10/2010	4:52:40 PM	SiCl4 post valve closed
9/10/2010	4:52:40 PM	Bubbler valve closed
9/10/2010	4:52:40 PM	Helium valve opened
9/10/2010	4:52:40 PM	Main Vac valve opened
9/10/2010	4:52:40 PM	Bypass valve opened
9/10/2010	4:52:40 PM	Helium MFC set to  100.000000
9/10/2010	4:52:40 PM	H2 MFC set to  0.000000
9/10/2010	4:52:40 PM	BCl3 MFC set to  0.000000
9/10/2010	4:52:40 PM	PHl3 MFC set to  0.000000
9/10/2010	4:52:40 PM	SiCl4 MFC set to  0.000000
9/10/2010	4:52:40 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	4:52:40 PM	Tube furnace set to 0
9/10/2010	4:53:40 PM	Helium valve closed
9/10/2010	4:53:40 PM	H2 valve closed
9/10/2010	4:53:40 PM	BCl3 valve closed
9/10/2010	4:53:40 PM	PH3 valve closed
9/10/2010	4:53:40 PM	SiCl4 pre valve closed
9/10/2010	4:53:40 PM	SiCl4 post valve closed
9/10/2010	4:53:40 PM	Bubbler valve closed
9/10/2010	4:53:40 PM	Main Vac valve opened
9/10/2010	4:53:40 PM	Bypass valve opened
9/10/2010	4:53:40 PM	Helium MFC set to  0.000000
9/10/2010	4:53:40 PM	H2 MFC set to  0.000000
9/10/2010	4:53:40 PM	BCl3 MFC set to  0.000000
9/10/2010	4:53:40 PM	PHl3 MFC set to  0.000000
9/10/2010	4:53:40 PM	SiCl4 MFC set to  0.000000
9/10/2010	4:53:40 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	4:53:40 PM	Tube furnace set to 0
9/10/2010	4:54:40 PM	H2 valve closed
9/10/2010	4:54:40 PM	BCl3 valve closed
9/10/2010	4:54:40 PM	PH3 valve closed
9/10/2010	4:54:40 PM	SiCl4 pre valve closed
9/10/2010	4:54:40 PM	SiCl4 post valve closed
9/10/2010	4:54:40 PM	Bubbler valve closed
9/10/2010	4:54:40 PM	Helium valve opened
9/10/2010	4:54:40 PM	Main Vac valve opened
9/10/2010	4:54:40 PM	Bypass valve opened
9/10/2010	4:54:40 PM	Helium MFC set to  100.000000
9/10/2010	4:54:40 PM	H2 MFC set to  0.000000
9/10/2010	4:54:40 PM	BCl3 MFC set to  0.000000
9/10/2010	4:54:40 PM	PHl3 MFC set to  0.000000
9/10/2010	4:54:40 PM	SiCl4 MFC set to  0.000000
9/10/2010	4:54:40 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	4:54:40 PM	Tube furnace set to 0
9/10/2010	4:55:41 PM	Helium valve closed
9/10/2010	4:55:41 PM	H2 valve closed
9/10/2010	4:55:41 PM	BCl3 valve closed
9/10/2010	4:55:41 PM	PH3 valve closed
9/10/2010	4:55:41 PM	SiCl4 pre valve closed
9/10/2010	4:55:41 PM	SiCl4 post valve closed
9/10/2010	4:55:41 PM	Bubbler valve closed
9/10/2010	4:55:41 PM	Main Vac valve opened
9/10/2010	4:55:41 PM	Bypass valve opened
9/10/2010	4:55:41 PM	Helium MFC set to  0.000000
9/10/2010	4:55:41 PM	H2 MFC set to  0.000000
9/10/2010	4:55:41 PM	BCl3 MFC set to  0.000000
9/10/2010	4:55:41 PM	PHl3 MFC set to  0.000000
9/10/2010	4:55:41 PM	SiCl4 MFC set to  0.000000
9/10/2010	4:55:41 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	4:55:41 PM	Tube furnace set to 0
9/10/2010	4:56:41 PM	H2 valve closed
9/10/2010	4:56:41 PM	BCl3 valve closed
9/10/2010	4:56:41 PM	PH3 valve closed
9/10/2010	4:56:41 PM	SiCl4 pre valve closed
9/10/2010	4:56:41 PM	SiCl4 post valve closed
9/10/2010	4:56:41 PM	Bubbler valve closed
9/10/2010	4:56:41 PM	Helium valve opened
9/10/2010	4:56:41 PM	Main Vac valve opened
9/10/2010	4:56:41 PM	Bypass valve opened
9/10/2010	4:56:41 PM	Helium MFC set to  100.000000
9/10/2010	4:56:41 PM	H2 MFC set to  0.000000
9/10/2010	4:56:41 PM	BCl3 MFC set to  0.000000
9/10/2010	4:56:41 PM	PHl3 MFC set to  0.000000
9/10/2010	4:56:41 PM	SiCl4 MFC set to  0.000000
9/10/2010	4:56:41 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	4:56:41 PM	Tube furnace set to 0
9/10/2010	4:57:41 PM	Helium valve closed
9/10/2010	4:57:41 PM	H2 valve closed
9/10/2010	4:57:41 PM	BCl3 valve closed
9/10/2010	4:57:41 PM	PH3 valve closed
9/10/2010	4:57:41 PM	SiCl4 pre valve closed
9/10/2010	4:57:41 PM	SiCl4 post valve closed
9/10/2010	4:57:41 PM	Bubbler valve closed
9/10/2010	4:57:41 PM	Main Vac valve opened
9/10/2010	4:57:41 PM	Bypass valve opened
9/10/2010	4:57:41 PM	Helium MFC set to  0.000000
9/10/2010	4:57:41 PM	H2 MFC set to  0.000000
9/10/2010	4:57:41 PM	BCl3 MFC set to  0.000000
9/10/2010	4:57:41 PM	PHl3 MFC set to  0.000000
9/10/2010	4:57:41 PM	SiCl4 MFC set to  0.000000
9/10/2010	4:57:41 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	4:57:41 PM	Tube furnace set to 0
9/10/2010	4:58:41 PM	H2 valve closed
9/10/2010	4:58:41 PM	BCl3 valve closed
9/10/2010	4:58:41 PM	PH3 valve closed
9/10/2010	4:58:41 PM	SiCl4 pre valve closed
9/10/2010	4:58:41 PM	SiCl4 post valve closed
9/10/2010	4:58:41 PM	Bubbler valve closed
9/10/2010	4:58:41 PM	Helium valve opened
9/10/2010	4:58:41 PM	Main Vac valve opened
9/10/2010	4:58:41 PM	Bypass valve opened
9/10/2010	4:58:41 PM	Helium MFC set to  100.000000
9/10/2010	4:58:41 PM	H2 MFC set to  0.000000
9/10/2010	4:58:41 PM	BCl3 MFC set to  0.000000
9/10/2010	4:58:41 PM	PHl3 MFC set to  0.000000
9/10/2010	4:58:41 PM	SiCl4 MFC set to  0.000000
9/10/2010	4:58:41 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	4:58:41 PM	Tube furnace set to 0
9/10/2010	4:59:41 PM	Helium valve closed
9/10/2010	4:59:41 PM	H2 valve closed
9/10/2010	4:59:41 PM	BCl3 valve closed
9/10/2010	4:59:41 PM	PH3 valve closed
9/10/2010	4:59:41 PM	SiCl4 pre valve closed
9/10/2010	4:59:41 PM	SiCl4 post valve closed
9/10/2010	4:59:41 PM	Bubbler valve closed
9/10/2010	4:59:41 PM	Main Vac valve opened
9/10/2010	4:59:41 PM	Bypass valve opened
9/10/2010	4:59:41 PM	Helium MFC set to  0.000000
9/10/2010	4:59:41 PM	H2 MFC set to  0.000000
9/10/2010	4:59:41 PM	BCl3 MFC set to  0.000000
9/10/2010	4:59:41 PM	PHl3 MFC set to  0.000000
9/10/2010	4:59:41 PM	SiCl4 MFC set to  0.000000
9/10/2010	4:59:41 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	4:59:42 PM	Tube furnace set to 0
9/10/2010	4:59:43 PM	Run finished at 4:59 PM
9/10/2010	4:59:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/10/2010	5:24:50 PM	Helium MFC set to  100.000000
9/10/2010	5:24:51 PM	Helium valve opened
9/10/2010	5:58:35 PM	Helium valve closed
9/10/2010	5:58:40 PM	Helium MFC set to  0.000000
9/10/2010	5:59:22 PM	Main Vac valve closed
9/10/2010	5:59:23 PM	Bypass valve closed
9/10/2010	5:59:34 PM	Bypass valve opened
9/10/2010	5:59:35 PM	Main Vac valve opened
9/10/2010	6:00:11 PM	Recipe started at 6:00 PM
9/10/2010	6:00:11 PM	Helium valve closed
9/10/2010	6:00:11 PM	BCl3 valve closed
9/10/2010	6:00:11 PM	PH3 valve closed
9/10/2010	6:00:11 PM	SiCl4 pre valve closed
9/10/2010	6:00:11 PM	SiCl4 post valve closed
9/10/2010	6:00:11 PM	Main Vac valve closed
9/10/2010	6:00:11 PM	Bypass valve closed
9/10/2010	6:00:11 PM	Bubbler valve closed
9/10/2010	6:00:11 PM	H2 valve opened
9/10/2010	6:00:11 PM	Helium MFC set to  0.000000
9/10/2010	6:00:11 PM	H2 MFC set to  500.000000
9/10/2010	6:00:11 PM	BCl3 MFC set to  0.000000
9/10/2010	6:00:11 PM	PHl3 MFC set to  0.000000
9/10/2010	6:00:11 PM	SiCl4 MFC set to  0.000000
9/10/2010	6:00:11 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	6:00:11 PM	Tube furnace set to 0
9/10/2010	6:01:34 PM	Helium valve closed
9/10/2010	6:01:34 PM	BCl3 valve closed
9/10/2010	6:01:34 PM	PH3 valve closed
9/10/2010	6:01:34 PM	SiCl4 pre valve closed
9/10/2010	6:01:34 PM	SiCl4 post valve closed
9/10/2010	6:01:34 PM	Main Vac valve closed
9/10/2010	6:01:34 PM	Bypass valve closed
9/10/2010	6:01:34 PM	H2 valve opened
9/10/2010	6:01:34 PM	Bubbler valve opened
9/10/2010	6:01:34 PM	Helium MFC set to  0.000000
9/10/2010	6:01:34 PM	H2 MFC set to  500.000000
9/10/2010	6:01:34 PM	BCl3 MFC set to  0.000000
9/10/2010	6:01:34 PM	PHl3 MFC set to  0.000000
9/10/2010	6:01:34 PM	SiCl4 MFC set to  0.000000
9/10/2010	6:01:34 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	6:01:34 PM	Tube furnace set to 1000
9/10/2010	6:21:34 PM	Helium valve closed
9/10/2010	6:21:34 PM	BCl3 valve closed
9/10/2010	6:21:34 PM	Main Vac valve closed
9/10/2010	6:21:34 PM	Bypass valve closed
9/10/2010	6:21:34 PM	H2 valve opened
9/10/2010	6:21:34 PM	PH3 valve opened
9/10/2010	6:21:34 PM	SiCl4 pre valve opened
9/10/2010	6:21:34 PM	SiCl4 post valve opened
9/10/2010	6:21:34 PM	Bubbler valve opened
9/10/2010	6:21:34 PM	Helium MFC set to  0.000000
9/10/2010	6:21:34 PM	H2 MFC set to  500.000000
9/10/2010	6:21:34 PM	BCl3 MFC set to  0.000000
9/10/2010	6:21:34 PM	PHl3 MFC set to  1.000000
9/10/2010	6:21:34 PM	SiCl4 MFC set to  50.000000
9/10/2010	6:21:34 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	6:21:34 PM	Tube furnace set to 1000
9/10/2010	6:51:34 PM	H2 valve closed
9/10/2010	6:51:34 PM	BCl3 valve closed
9/10/2010	6:51:34 PM	PH3 valve closed
9/10/2010	6:51:34 PM	SiCl4 pre valve closed
9/10/2010	6:51:34 PM	SiCl4 post valve closed
9/10/2010	6:51:34 PM	Main Vac valve closed
9/10/2010	6:51:34 PM	Bypass valve closed
9/10/2010	6:51:34 PM	Helium valve opened
9/10/2010	6:51:34 PM	Bubbler valve opened
9/10/2010	6:51:34 PM	Helium MFC set to  500.000000
9/10/2010	6:51:34 PM	H2 MFC set to  0.000000
9/10/2010	6:51:34 PM	BCl3 MFC set to  0.000000
9/10/2010	6:51:34 PM	PHl3 MFC set to  0.000000
9/10/2010	6:51:34 PM	SiCl4 MFC set to  0.000000
9/10/2010	6:51:34 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	6:51:34 PM	Tube furnace set to 0
9/10/2010	7:11:34 PM	Helium valve closed
9/10/2010	7:11:34 PM	H2 valve closed
9/10/2010	7:11:34 PM	BCl3 valve closed
9/10/2010	7:11:34 PM	PH3 valve closed
9/10/2010	7:11:34 PM	SiCl4 pre valve closed
9/10/2010	7:11:34 PM	SiCl4 post valve closed
9/10/2010	7:11:34 PM	Main Vac valve closed
9/10/2010	7:11:34 PM	Bypass valve closed
9/10/2010	7:11:34 PM	Bubbler valve closed
9/10/2010	7:11:34 PM	Helium MFC set to  0.000000
9/10/2010	7:11:34 PM	H2 MFC set to  0.000000
9/10/2010	7:11:34 PM	BCl3 MFC set to  0.000000
9/10/2010	7:11:34 PM	PHl3 MFC set to  0.000000
9/10/2010	7:11:34 PM	SiCl4 MFC set to  0.000000
9/10/2010	7:11:34 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	7:11:35 PM	Tube furnace set to 0
9/10/2010	7:11:35 PM	Run finished at 7:11 PM
9/10/2010	8:16:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/10/2010	8:16:49 PM	Recipe started at 8:16 PM
9/10/2010	8:16:49 PM	Helium valve closed
9/10/2010	8:16:49 PM	H2 valve closed
9/10/2010	8:16:49 PM	BCl3 valve closed
9/10/2010	8:16:49 PM	PH3 valve closed
9/10/2010	8:16:49 PM	SiCl4 pre valve closed
9/10/2010	8:16:49 PM	SiCl4 post valve closed
9/10/2010	8:16:49 PM	Main Vac valve closed
9/10/2010	8:16:49 PM	Bubbler valve closed
9/10/2010	8:16:49 PM	Bypass valve opened
9/10/2010	8:16:49 PM	Helium MFC set to  0.000000
9/10/2010	8:16:49 PM	H2 MFC set to  0.000000
9/10/2010	8:16:49 PM	BCl3 MFC set to  0.000000
9/10/2010	8:16:49 PM	PHl3 MFC set to  0.000000
9/10/2010	8:16:49 PM	SiCl4 MFC set to  0.000000
9/10/2010	8:16:49 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	8:16:49 PM	Tube furnace set to 0
9/10/2010	8:17:31 PM	Helium valve closed
9/10/2010	8:17:31 PM	H2 valve closed
9/10/2010	8:17:31 PM	BCl3 valve closed
9/10/2010	8:17:31 PM	PH3 valve closed
9/10/2010	8:17:31 PM	SiCl4 pre valve closed
9/10/2010	8:17:31 PM	SiCl4 post valve closed
9/10/2010	8:17:31 PM	Bubbler valve closed
9/10/2010	8:17:31 PM	Main Vac valve opened
9/10/2010	8:17:31 PM	Bypass valve opened
9/10/2010	8:17:31 PM	Helium MFC set to  0.000000
9/10/2010	8:17:31 PM	H2 MFC set to  0.000000
9/10/2010	8:17:31 PM	BCl3 MFC set to  0.000000
9/10/2010	8:17:31 PM	PHl3 MFC set to  0.000000
9/10/2010	8:17:31 PM	SiCl4 MFC set to  0.000000
9/10/2010	8:17:31 PM	Bypass solenoid MFC set to  0.000000
9/10/2010	8:17:31 PM	Tube furnace set to 0
9/10/2010	8:17:31 PM	Run finished at 8:17 PM
9/10/2010	8:17:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
